電子顯微鏡實驗室環境建造及控制技術
「空調/振動/磁場/噪音」

Ambient Conditions of the Site

Room
temperature
specification
Temperature Humidity
Practical operation Design & Running test
20˚C / 0.8˚C P-P / 24hr 20˚C / 0.2˚C P-P / 24hr < 70%RH
Floor vibration Horizontal Vertical
1~10HZ >10Hz 1~10HZ >10Hz
VC-F VC-F VC-E VC-E
Megnetic Horizontal Vertical
<30nT <50nT
Acoustics 50~200Hz 200~1000Hz >1000Hz
<60dB <60dB <60dB

Room Cleanliness

The proposed site must be clean of dust. The advised dust class in ISO 8.

Class Maximum Particles/m3 FED STD 209E
equivalent
≧0.1 µm ≧0.2 µm ≧0.3 µm ≧0.5 µm ≧1 µm ≧5 µm
ISO 1 10 2
ISO 2 100 24 10 4
ISO 3 1,000 237 102 35 8 Class1
ISO 4 10,000 2,370 1,020 352 83 Class10
ISO 5 100,000 23,700 10,200 3,520 830 29 Class100
ISO 6 1,000,000 237,000 102,000 35,200 8,300 293 Class1K
ISO 7 352,000 83,000 2,930 Class10K
ISO 8 3,520,000 830,000 29,300 Class100K
ISO 9 35,200,000 8,300,000 293,000 Room air